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200mm
300mm
Controls & Software
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Semiconductor Industry - Conveyor modules

 

For the 200mm semiconductor industry the basic modules are:

 

ld504.jpg Linear Drives (LD)  
QS.jpg Rotating devices (QS)  
Elevator.jpg Elevators (EL)  
 

 

Shuttles

 

 
 

 

 

 

 

 

 

 
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