Middlesex Industries Global Site

PROfab in the semiconductor industry

Middlesex PROfab control is designed to perfectly suit the need for high efficiency, high throughput, and minimum cycle time needed in the semiconductor manufacturing environment.

The characteristics of the semiconductor manufacturing process require the introduction of some specific concepts to the control logic:

• small form-factor local control module. This LCM module is the first interfacing point to the conveyor hardware. It performs basic operations like motor running, sensor readings, tracking of carriers through readers, point to point WIP moves
• a failsafe, redundant central control module. The CCM contains the real time information about the status of the conveyor network (WIP location and destination, hardware status …). A dispatching algorithm will also be executed in it
• central distributed database that allows for an immediate and very easy reconfiguration of the transportation network layout. All the real time changes are periodically stored there, as well the configuration changes
• an integrated host interface module (that makes use of the SECS/GEM protocol) for the connectivity with third-party systems (MES, …) or tools
• a multi-view, multistage high definition graphics user interface, fully customizable to the system needs
• a unique dispatching MTT™ * algorithm minimizing system variability of the semiconductor manufacturing process

* MTT™ algorithm (Minimum Transit Times)

Minimum Transit Times is the concept included in the PROFab control logic. Its singular characteristic consists in optimizing the queuing network, finding the fastest way out of the transport domain. To achieve this, the received WIP is staged near destinations which will allow the quickest exit from the domain. This special feature will use RT transport domain information to minimize transport time.

Middlesex PROfab software control also features:

• Class 1 cleanliness achieved through a patented motor clutch. This component prevents particle contamination caused by excessive high acceleration/deceleration contact friction

• Asynchronous WIP movement through independent control of drive motors
• Soft buffer accumulation of queued WIPs, featuring contact free and safe movements throughout the conveyor network
• High density, high throughput movement of WIPs
• Incredible smoothness of movement, minimizing WIP vibrations
• SEMI standard compliance

A typical control configuration for a semiconductor fab will be composed of many Local Control Modules connected to a single Central Control Module, where most of the decisional logic will take place. A configuration and runtime database, a factory host interface and a variable number of GUIs will also be connected to the CCM.