Middlesex

Intelligent wafer transport for 200mm and 300mm FABs

In semiconductor and microelectronics manufacturing, precision and cleanliness define success. Every wafer, every FOUP, and every second in motion affects yield, throughput, and product integrity.

Middlesex systems are engineered precisely for this world

With more than three decades of experience inside semiconductor FABs, we design, manufacture, and support advanced conveyor-based and hybrid wafer transport systems for both 200mm and 300mm environments.

Our technology combines mechanical excellence, patented clean-motion design, and distributed control intelligence - delivering stable, predictable, and contamination-free transport from tool to tool.

Engineered for ISO-critical environments

200mm and 300mm FABs demand ISO Class 3 cleanliness, even across complex layouts with dozens of tools, buffers, and storage points. Middlesex systems are designed from the ground up to maintain these standards while optimizing flow and uptime.

Key design principles include:

  • Non-particle-generating materials and fully enclosed mechanics that prevent air turbulence and micro-contamination.
  • Patented belt-based motion technology - no rollers, no friction points, no particles generation.
  • Vibration-optimized conveyor drives to protect exposed wafers and sensitive assemblies.
  • Compact, modular conveyor sections for clean integration in dense tool clusters and retrofits.
  • Easy-clean, maintenance-friendly design minimizing service time in controlled environments.

Each conveyor segment is independently managed by a Transfer Management Unit (TMU), providing localized logic, precise motion control, and redundancy. This distributed approach eliminates central bottlenecks, allowing the system to scale seamlessly as your FAB expands.

Intelligent control and continuous traceability

At the software level, Middlesex systems use a modular, distributed control architecture that ensures real-time FOUP tracking, dynamic routing and autonomous error and power failure recovery without downtime. Each system module is segmented and individually controlled, enabling intelligent buffering, fast acceleration for high-density movements, and continuous flow.

  • Every conveyor zone includes local sensing and control boards for motor, position, and status feedback.
  • TMUs manage roughly 50 zones each and communicate over redundant CAN fieldbus networks for fault tolerance.
  • All TMUs connect via TCP/IP Ethernet to a central Dispatch Controller, which provides unified visualization, data aggregation, and host communication.

This architecture provides 99.999% uptime, immediate fault isolation, and full FOUP traceability without RFID - reducing cost and simplifying system validation.

I/O port grouping and destination buffer management enable the selection of the optimal buffer within a defined port group, improving flow balance and reducing the host’s workload.

When combined with our patented Hybrid AMHS, conveyors and OHTs (Overhead Hoist Transports) work together as a synchronized system - enabling lower variability and faster cycle times across the entire FAB.

Thanks to expertise gained from dozens of installations across Europe, the United States, and Asia, our systems have evolved into a recognized standard for cleanliness, speed, transport density, and reliability.

Concrete benefits for semiconductor manufacturing

Middlesex operates from Switzerland and the U.S., supporting installations in Europe and Asia - wherever wafer transport precision defines production success.

Want to optimize your FAB with our systems?

Want to optimize your 200mm or 300mm FAB with intelligent wafer transport? From clean, vibration-free conveyors to patented hybrid AMHS systems, Middlesex delivers transport solutions that enhance yield, reduce variability, and maximize uptime.

Contact us today to discuss your project with our specialists.

Other Advanced Applications

Beyond pharmaceutical and biotech environments, Middlesex conveyor and control systems are increasingly used in next-generation clean manufacturing - from battery assembly and optical components to micro-mechanical and laboratory automation.

Wherever production demands precision, traceability, and cleanliness, Middlesex technology provides a modular foundation that adapts to the process - not the other way around.

Benefits of Conveyor

Versatility is our strength

At Middlesex, we combine engineering precision with application-specific insight. Every project is developed around your process - optimizing flow, reducing cycle time and increasing throughput.

Work with our global team to define a custom conveyor or hybrid system architecture that matches your production environment. Contact us today for a personalized consultation and discover how Middlesex can bring intelligence and stability to your material transport operations.

Our Valuable Customers and Partners

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